发明名称 TITANIUM NANO FINE WIRE, PRODUCTION OF TITANIUM NANO FINE WIRE, STRUCTURAL BODY, AND ELECTRON-EMITTING ELEMENT
摘要 <p>PROBLEM TO BE SOLVED: To obtain a titanium nano fine wire having a uniform wire diameter by forming a structural body provided with a layer having fine pores on a base body having a surface containing titanium and in which the pores extend to the surface and then, heat-treating the structural body to form fine wires containing titanium in the pores. SOLUTION: A base body 10 is obtd. by forming a layer 11 which constitutes a surface containing titanium on the surface of a substrate 16 such as quartz glass and Si. Then, a film 12 essentially comprising Al is formed on the layer 11 of the base body 10 and is subjected to anodic oxidation to form a porous body 13 comprising anodically oxidized alumina having pores extending to the surface on the base body 10. The structural body forming the porous body 13 on the base body 10 provided with the surface containing titanium is heat- treated in an atmosphere containing >=1 Pa water vapor at 500 to 1,000 deg.C to allow the titanium in the pore bottoms to react with the atmosphere to form titanium nano fine wires 15 having <=300 nm diametert essentially comprising titanium in the pores of the porous body 13.</p>
申请公布号 JPH11246300(A) 申请公布日期 1999.09.14
申请号 JP19980313939 申请日期 1998.10.19
申请人 CANON INC 发明人 IWASAKI TATSUYA;DEN TORU
分类号 C30B29/62;B22F9/02;B22F9/12;B22F9/14;C25D11/04;H01J1/304;H01J9/02;H01L21/28;H01L29/06;(IPC1-7):C30B29/62;H01J1/30 主分类号 C30B29/62
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