发明名称 Thin film transistor and method for manufacturing the same
摘要 A thin film transistor (TFT) and a method for manufacturing the same suitable for improving device characteristics by using a self-align technology are disclosed, the TFT including a substrate; a gate electrode having first and second sides on the substrate; a first conductive layer pattern formed on the substrate, wherein between the first conductive layer pattern and the first side of the gate electrode is a sidewall spacer; the sidewall spacer; a second conductive layer pattern formed on the substrate to be connected to the first conductive layer pattern; a gate insulating layer formed on the gate electrode; an active layer formed on the gate insulating layer, the sidewall spacer, the first conductive layer pattern, and the substrate; a source region formed in the active layer at the second side of the gate electrode; and a drain region formed on the active layer on the first conductive layer pattern.
申请公布号 US5952677(A) 申请公布日期 1999.09.14
申请号 US19980073869 申请日期 1998.05.07
申请人 LG SEMICON CO., LTD. 发明人 PARK, SUNG KYE
分类号 H01L21/336;H01L29/786;(IPC1-7):H01L29/76;H01L31/036;H01L31/112 主分类号 H01L21/336
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