摘要 |
A device for crucible free zone melting on crystallizable rods, in particular on semiconductor rods, in which the molten zone is produced in the rod which is to be treated, by the electromagnetic field of an induction heating coil which surrounds the rod in annular fashion and at a distance, in which the induction heating coil is supplemented by a parallel-connected capacitor to form an electric heating oscillatory circuit, and in which the oscillatory heating circuit is fed via a high frequency line and at least one adjustable coupling element by a high frequency generator which supplies an a.c. voltage of adjustable frequency. Circuit components are provided between the output of the high frequency generator and the electric heating oscillatory circuit which contains the induction heating coil; at least the high frequency line of such components is equipped with a channel which conducts a flowing coolant. |