| 摘要 |
<p>A plasma reactor comprises an electromagnetic energy source coupled to a radiator through first and second variable impedance networks. The plasma reactor includes a chamber having a dielectric window that is proximate to the radiator. A shield is positioned between the radiator and the dielectric window. The shield substantially covers a surface of the radiator near the dielectric window. A portion of the radiator that is not covered by the shield is proximate to a conductive wall of the chamber. Plasma reactor operation includes the following steps: a plasma is ignited in a chamber with substantially capacitive electric energy coupled from the radiator; a variable impedance network is tuned so that the capacitive electric energy coupled into the chamber is diminished; the plasma is then powered with substantially magnetic energy.</p> |
