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经营范围
发明名称
MICROWAVE PLASMA TREATING DEVICE AND METHOD THEREOF
摘要
申请公布号
KR100220132(B1)
申请公布日期
1999.09.01
申请号
KR19960041213
申请日期
1996.09.20
申请人
CANON KABUSHIKI KAISHA
发明人
SUZUKI, NOBUMASA
分类号
C23C16/50;C23C16/511;H01J37/32;H01L21/3065;(IPC1-7):C23C16/50
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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BATTERY
