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发明名称
FARADAY-CUP ASSEMBLY OF SEMICONDUCTOR ION IMPLANTER
摘要
申请公布号
KR100219411(B1)
申请公布日期
1999.09.01
申请号
KR19960017070
申请日期
1996.05.20
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
OH, SANG-KEUN;KIM, JEONG-KON
分类号
H01L21/265;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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