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发明名称
ROLLER SYSTEM OF SEMICONDUCTOR MANUFACTURE APPARATUS
摘要
申请公布号
KR200156808(Y1)
申请公布日期
1999.09.01
申请号
KR19960050872U
申请日期
1996.12.18
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
LEE, CHUN-TAK
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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