| 摘要 |
An apparatus is provided for cleaning a workpiece with solid CO2 particles. A flow channel member includes a flow channel therein having an exhaust nozzle at a distal end thereof. A source of pressurized air is provided in selective fluid communication with the flow channel. A phase separator includes first and second portions, with the first portion being in selective fluid communication with the flow channel. A source of liquid CO2 is provided in selective fluid communication with the phase separator. A liquid flow line includes first and second ends, with the first end being in fluid communication with the second portion of the phase separator, and the second end includes an injector nozzle positioned with the flow channel. The phase separator is operative to separate CO2 vapor from the liquid CO2 such that the vapor travels to the first portion for selective communication with the flow channel and the liquid remains in the second portion for injection through the injector nozzle.
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