| 摘要 |
PROBLEM TO BE SOLVED: To provide the pellicle structure of a mask by which a pellicle ID label constituted of the electrical continuity part and the non-continuity part of a pellicle itself is fixed to a pellicle frame itself and pellicle ID can be electrically read and a device and a method for discriminating the pellicle ID. SOLUTION: The pellicle 1 is constituted so that the pellicle ID label 5 constituted of a pattern part 2, a conductive part 3 and an adhesive agent layer part 4 is fixed to the pellicle frame 7 by an adhesive agent part 6. Besides, it is provided with a pellicle ID read part which can electrically read the pellicle ID and a pattern for drawing out a signal constituted of conductive Cr thin film metal on the mask so that it can be electrically brought into contact with the pellicle ID and the pellicle ID read part. |
