发明名称 METHOD FOR WASHING OBJECT TO BE TREATED
摘要 <p>PROBLEM TO BE SOLVED: To provide a method for washing objects to be treated by which objects carried by a plurality of carriers are transported and treated all together. SOLUTION: This method for washing objects to be treated is carried out by taking a plurality of objects out of each one of two carriers 48 each of which carries a plurality of objects arranged at equal intervals, relatively moving the respective objects of two groups taken out of these two carriers 48 gradually closer as to make the gaps of the opposed ends of the objects equal to the intervals of other objects, transporting the two groups of the objects by a transporting arm 24 while keeping the objects in such a defined state, transferring the objects to object supporting parts of washing parts 10, 12 and 14 at the object transferring positions, further moving the object supporting parts supporting the two groups of objects to a washing position, and then washing the two groups of objects supported by the object supporting parts at the washing position.</p>
申请公布号 JPH11226528(A) 申请公布日期 1999.08.24
申请号 JP19980314013 申请日期 1998.10.16
申请人 TOKYO ELECTRON LTD 发明人 NISHI MITSUO
分类号 B08B3/04;H01L21/304;H01L21/677;H01L21/68;(IPC1-7):B08B3/04 主分类号 B08B3/04
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