发明名称 Apparatus and method for automating the underfill of flip-chip devices
摘要 An apparatus and method for underfilling a silicon chip (16) to a substrate (12) by depositing an underfill dam (18) on the surface (20) of the substrate (12) prior to addition of the underfill material (14), is disclosed. A bead of underfill material (14) is provided on the substrate (12) about the periphery of the silicon chip (16), within the underfill dam (18). The underfill material (14) fills the gap (22) between the electrical contacts, the substrate (12) and the silicon chip (16) by capillary action and differential pressure created by a vacuum system (40).
申请公布号 US5942798(A) 申请公布日期 1999.08.24
申请号 US19970977078 申请日期 1997.11.24
申请人 STMICROELECTRONICS, INC. 发明人 CHIU, ANTHONY M.
分类号 H01L21/56;(IPC1-7):H01L23/48 主分类号 H01L21/56
代理机构 代理人
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