| 摘要 |
PROBLEM TO BE SOLVED: To provide a multiple polishing device wherein necessity for a robot between adjacent polishing units is eliminated to decrease the number of robots to be used, a cost is reduced, and the device is miniaturized. SOLUTION: This constitution is formed such that a block transfer mechanism 12 having a block guide 16 freely displaceable between a first position in contact with a block 5 on a surface plate 3 and a second position not in contact with the block is provided between adjacent polishing units 1, 1, and by this block guide 16, the block 5 provided on the surface plate 3 of the polishing unit 1 in a front step is made to sideslip so as to be moved onto the surface plate 3 of the polishing unit 1 in a rear step. |
