| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer device which can transfer a large size of the substrate in a high speed, in a simple structure reducing the movable part, make the necessary setting space small, transfer at a high accuracy even when the transferring distance is large, and can reduce the necessary power. SOLUTION: A transfer device to transfer a substrate by holding the lower face of the plane form of the substrate 1 supported horizontally, from the carrying-in position to the carrying-out position, has a carrying-in hand 10 to transfer the substrate 1 to an intermediate position by supporting the substrate at the carrying-in position, and a carrying-out hand 12 to move the substrate to the carrying-out position by supporting it at the intermediate position. The carrying-in hand 10 and the carrying-out hand 12 are movable horizontally, and movable vertically respectively in the pick-up direction X of the substrate at the carrying-in position, and allowable to cross vertically each other in the intermediate position, and furthermore, they are composed to make the other side rise and movable horizontally in the direction X, when one side is lowered. |
