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发明名称
摘要
申请公布号
JP2938152(B2)
申请公布日期
1999.08.23
申请号
JP19900177321
申请日期
1990.07.06
申请人
TOSHIBA KK
发明人
SAKAI TADASHI
分类号
H01L21/28;H01L21/02;H01L27/12;(IPC1-7):H01L21/28
主分类号
H01L21/28
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代理人
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