Low friction, ultra-hard, elastic carbon nitride or other nitride coating for electronic, optical and tribological applications

摘要

A low friction, ultra-hard, elastic carbon nitride coating is new. A novel carbon nitride coating has a low friction coefficient, a hardness of greater than 65 GPa, an elasticity of greater than 160 GPa and the formula CNx (x = greater than 0.3). An Independent claim is also included for preparation of a group IIIa, IVa, IVb or VIb metal or metalloid nitride coating by (a) positioning a metal or metalloid target (2) in a reaction chamber (1) at a distance from a microwave discharge zone (10) in a nitrogen stream (8) such that the nitrogen plasma formed in the target zone (12) is in ionic form; and (b) directing a pulsed IR CO2 laser beam onto the target to deposit metal or metalloid nitride on a substrate (6) below the target.