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发明名称
Verfahren zur Herstellung eines Markierungszeichens auf einer Halbleiterscheibe mit einer vergrabenen Struktur
摘要
申请公布号
DE69510741(D1)
申请公布日期
1999.08.19
申请号
DE1995610741
申请日期
1995.08.22
申请人
ALCATEL
发明人
MALLECOT, FRANCK;LEGOUEZIGOU, LIONEL;ARTIGUE, CLAUDE;POINGT, FRANCIS;LECLERC, DENIS;POMMEREAU, FREDERIC
分类号
H01L23/544;(IPC1-7):H01L23/544
主分类号
H01L23/544
代理机构
代理人
主权项
地址
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