| 摘要 |
<p>Developer injection nozzles (4, 15) formed by fixedly storing in a housing (8) a plurality of tubes (6) of a specified length and a minute inner diameter which have a plurality of minute holes (14) in the side peripheral part thereof in a bundle and at an interval provided between them, wherein a developer (12) fed from a developer feeding source (1) is passed into divided spaces inside the housing (8), and delivered through the tubes (6) and injected from the minute holes (14) provided in the tubes (6) so that the injection condition of the developer (12) is concentrated in the same manner as is injected from one hollow nozzle and spread from the center part concentrically to the peripheral part of a wafer regardless of the fact that it is delivered through the plurality of tubes (6).</p> |
