Vorrichtung zum Halten eines flachen Substrats,申请号DE19975000260-传众专利搜索

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发明名称	Vorrichtung zum Halten eines flachen Substrats
摘要
申请公布号	DE59700260(D1)	申请公布日期	1999.08.19
申请号	DE19975000260	申请日期	1997.12.12
申请人	LEYBOLD SYSTEMS GMBH	发明人	SCHUESSLER, UWE;KRAEMER, HARALD;BANGERT, STEFAN;KOENIG, MICHAEL
分类号	B65G47/90;C23C14/50;(IPC1-7):B65G47/90	主分类号	B65G47/90
代理机构		代理人
主权项
地址

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