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发明名称
Verfahren zur Strukturierung von Wolframschichten
摘要
申请公布号
DE69228044(T2)
申请公布日期
1999.08.19
申请号
DE19926028044T
申请日期
1992.10.21
申请人
AT & T CORP.
发明人
FULLOWAN, THOMAS ROBERT;PEARTON, STEPHEN JOHN;REN, FAN
分类号
C23F4/00;H01L21/28;H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/321
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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