Ion source

摘要

The ion source has a pref. cylindrical housing (1) contg. an anode (2), magnetic coil (3) and an aperture system forming part of a gas conducting system. The coil is centrally mounted on one axial end of the housing so its magnetic field diverges towards the anode, which is outside the strong field region. The other housing end is a cover with a central ion outlet (6). The anode is an annular water-cooled tube anode with inner dia. greater than the ion outlet, which forms a stop. The gas conducting system has a working gas inlet in the base (8) or housing casing near the coil. The gas stop system has a stop ring (5) facing the anode with a gas tight attachment to the inner housing wall and a central stop plate (4)facing the coil. A cathode (12) outside the housing is mounted outside the optical line between the anode and ion outlet, pref. on the housing top (10).