发明名称 METHOD OF PRODUCING PHASE MASK FOR FABRICATING OPTICAL FIBER AND OPTICAL FIBER WITH BRAGG'S DIFFRACTION GRATING PRODUCED BY USING THE PHASE MASK
摘要 The invention relates to a method of fabricating an optical fiber-processing phase mask in which a stitching error ascribable to a deterioration in the wavelength selectivity of the optical fiber diffraction grating to be fabricated is reduced. At an exposure step, a writing stage 5 with a phase mask blank 10 placed thereon is continuously fed in one direction while portions of the phase mask blank corresponding to grooves 26 or strips 27 in a direction perpendicular to the direction of feeding are sequentially scanned with writing beams 14, whereby the entire area of the phase mask blank 10 to be written is continuously written. <IMAGE>
申请公布号 EP0936505(A1) 申请公布日期 1999.08.18
申请号 EP19980941678 申请日期 1998.09.02
申请人 DAI NIPPON PRINTING CO., LTD.;NIPPON TELEGRAPH AND TELEPHONE CORPORATION 发明人 KURIHARA, MASAAKI;SEGAWA, TOSHIKAZU;KOMUKAI, TETSURO;NAKAZAWA, MASATAKA
分类号 G02B5/18;G02B6/02;G03F1/26;G03F1/68;G03F7/00;G03F7/20;H01L21/027 主分类号 G02B5/18
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