发明名称 |
METHOD OF PRODUCING PHASE MASK FOR FABRICATING OPTICAL FIBER AND OPTICAL FIBER WITH BRAGG'S DIFFRACTION GRATING PRODUCED BY USING THE PHASE MASK |
摘要 |
The invention relates to a method of fabricating an optical fiber-processing phase mask in which a stitching error ascribable to a deterioration in the wavelength selectivity of the optical fiber diffraction grating to be fabricated is reduced. At an exposure step, a writing stage 5 with a phase mask blank 10 placed thereon is continuously fed in one direction while portions of the phase mask blank corresponding to grooves 26 or strips 27 in a direction perpendicular to the direction of feeding are sequentially scanned with writing beams 14, whereby the entire area of the phase mask blank 10 to be written is continuously written. <IMAGE> |
申请公布号 |
EP0936505(A1) |
申请公布日期 |
1999.08.18 |
申请号 |
EP19980941678 |
申请日期 |
1998.09.02 |
申请人 |
DAI NIPPON PRINTING CO., LTD.;NIPPON TELEGRAPH AND TELEPHONE CORPORATION |
发明人 |
KURIHARA, MASAAKI;SEGAWA, TOSHIKAZU;KOMUKAI, TETSURO;NAKAZAWA, MASATAKA |
分类号 |
G02B5/18;G02B6/02;G03F1/26;G03F1/68;G03F7/00;G03F7/20;H01L21/027 |
主分类号 |
G02B5/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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