摘要 |
<p>The electron emission includes a layered body (28) including an auxiliary electrode (21), a first insulation layer (22), a first gate electrode (23), a second insulation layer (24), an emitter electrode (25), a third insulation layer (26), and a second gate electrode (27) formed in this order on a substrate (20). In this electron emission device, a hole (31, 33) is formed through the first insulation layer (22), the first gate electrode (23), the second insulation layer (24), the emitter electrode (25), the third insulation layer (26), and the second gate electrode (27), so that the auxiliary electrode (21) is exposed at the bottom of the hole (31, 33) and the first gate electrode (23) protrudes more than the emitter electrode (25) toward the center line of the hole (31, 33). <IMAGE></p> |