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发明名称
TESTING METHOD AND DEVICE FOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH11223661(A)
申请公布日期
1999.08.17
申请号
JP19980027168
申请日期
1998.02.09
申请人
MATSUSHITA ELECTRON CORP
发明人
MORIOKA TADAHARU
分类号
G01R31/02;G01R31/28;H01L21/66;(IPC1-7):G01R31/28
主分类号
G01R31/02
代理机构
代理人
主权项
地址
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