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发明名称
SPECIMEN POSITIONING METHOD AND TESTING DEVICE USING THE SAME
摘要
申请公布号
JPH11223656(A)
申请公布日期
1999.08.17
申请号
JP19980025411
申请日期
1998.02.06
申请人
JSR CORP
发明人
KOMATSU SATOSHI
分类号
G01R31/26;H01L23/32;H01R33/76;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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