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发明名称
DEVICE OF AND METHOD FOR MEASURING PATTERN COORDINATES
摘要
申请公布号
JPH11223515(A)
申请公布日期
1999.08.17
申请号
JP19980036585
申请日期
1998.02.04
申请人
NIKON CORP
发明人
KATO KATSUHIRO
分类号
G01B11/00;G01B11/24;G01B11/245;G03F9/00;(IPC1-7):G01B11/24
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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