| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a disc jig for removing particles, capable of inspecting and removing particles of a wafer conveyance means without wasting wafers, and using the same, to provide a method for controlling particles capable of preventing sudden increase of particles and the occurrence of an abnormal condition on the wafer holding surface of the wafer conveyance means. SOLUTION: A disc jig for removing particles 10 has a disc which can be held and conveyed, as well as a wafer by a wafer conveyance means, and the function of adsorbing particles on the surface 11a facing opposite to the wafer holding surface of the wafer conveyance means. The disc jig for 10 is conveyed by the wafer conveyance means to adsorb the particles on the wafer holding surface of the wafer conveyance means, and the adsorbed particles are detected, and particle adherence status is controlled on the basis of the detection data.</p> |
