| 摘要 |
PROBLEM TO BE SOLVED: To prevent coating liquid from being contaminated to enable easily controlling a trace of the coating liquid. SOLUTION: A glass substrate 4 attached to a slidable stage and a vertically movable coating head 7 for discharging photoresist 11 to a coating surface 5 of the glass substrate 4 are provided. The glass substrate 4 and the coating head 7 are arranged up and down respectively, and the coating surface 5 of the glass substrate 4 is turned downward, and the coating head 7 is constituted of a pair of lips 8, 9 opposite to each other. A gap between the opposite surfaces of the pair of the lips 8, 9 is made a discharging slit for the photoresist 11 turned in the up and down directions, and on the opposite surface of the one lip 9, a manifold 13 is formed, and the manifold 13 incorporates an expandable coating liquid discharging tube 18. Since the discharge of the photoresist 11 is controlled by the coating liquid discharging tube 18, the discharge can be hardly affected by a pump and piping. Thus, the discharge of a trace of the photoresist is made possible and an improvement in response can be expected. |
