| 摘要 |
PROBLEM TO BE SOLVED: To extremely speedily find mask conditions without working through trial and error and being strongly affected by errors by finding the mask conditions based on an approximate value provided by the Taylor's expansion of a general equality expressing an optical path difference function satisfying prescribed optical characteristics. SOLUTION: The image of a beam waist (ω1 ) existent on coordinates (X1 , (Y1 , Z1 ) of an incident side medium having a refractive index (n) is formed into beam waist (ω2 ) existent on coordinates (X2 , Y2 , Z2 ) of the incident side medium, and an optical path difference functionρ(x, y) satisfying the optical characteristics showing a focal distance (f) is found as the general equality ofρ(x,y)=(1/2).(x<2> +y<2> +f<2> )<1/2> -(f/2)+(n+2).(X1 x+Y1 y)/(X1 <2> +Y1 <2> +Z1 <2> )<1/2> -(n/2).(X2 x+Y2 y)/(X2 <2> +Y2 <2> +Z2 <2> )<1/2> . The approximate value is found by the Taylor's expansion of the found optical path difference function, and the mask conditions are found by inputting the coefficients of respective terms in this approximate value to a computer program.
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