| 摘要 |
PROBLEM TO BE SOLVED: To remarkably reduce the release of hydrogen peroxide from a sterilization chamber by a method in which gas from the chamber containing hydrogen peroxide vapor is passed through a member bed which is coated with a noble metal catalyst for hydrogen peroxide and arranged in a channel to convert the hydrogen peroxide into hydrogen and oxygen. SOLUTION: In a sterilization chamber 12, usually, exhaust is done into an atmosphere in the chamber including a sterilizer 10 through its outlet 16. A vacuum pump 18 is installed in such an exhaust system, gas is sucked from the chamber 12 by the actuation of the pump 18 and sent from the outlet 16. In this process, when the gas in the chamber 12 is discharged, the pressure in the inside is reduced to 0.5 Torr or below by the pump 18. Next, hydrogen peroxide is introduced into the chamber 12, and the pressure in the chamber 12 is restored to about 10 Torr. By catalyst converters 20, 22 installed in the upper and lower flows of the pump 18, the hydrogen peroxide in the gas passing through a channel 14 is converted into oxygen and hydrogen by a catalyst to reduce the concentration of hydrogen peroxide at the outlet 16. |
