APPARATUS FOR SUPPORTING BASE PLATE, APPARATUS AND METHOD FOR TRANSFERRING BASE PLATE, METHOD OF REPLACING BASE PLATE, AND EXPOSURE APPARATUS AND METHOD OF MANUFACTURING THE SAME

摘要

An apparatus (26) for supporting a base plate (P) is provided with a support portion engageable with grooves of a base plate holder (l4), so that the base plate support apparatus (26) is transferred integrally with the base plate (P) to a position above the base plate holder (l4) by a transfer arm (24), the support portion of the base plate support apparatus (26) engaging the grooves (l4a) of the base plate holder (l4) when the transfer arm (24) retaining the base plate support apparatus (26) is driven downward, the engagement of the support portion with the grooves causing an upper surface of the holder to directly contact the base plate (P), so that the base plate (P) can be suck-held by the base plate holder (l4) via an opening, the base plate holder not requiring a heavy and complicated vertically moving mechanism and not causing the flatness of a holder surface to be deteriorated, the base plate becoming possible to be transferred onto the base plate holder speedily and safely without being damaged even when a space on the side of a base plate mounting surface of the base plate holder is small.