| 申请人 |
SEMICONDUCTOR PROCESS LABORATORY, CO. LTD., TOKIO/TOKYO, JP;ALCAN- TECH CO. INC., TOKIO/TOKYO, JP;CANON SALES CO. INC., TOKIO/TOKYO, JP |
发明人 |
MAEDA, KAZUO, C/O SEMICONDUCTOR PROCESS, MINATO-KU, TOKYO, JP;TOKUMASU, NOBORU, C/O SEMICONDUCTOR PROCESS, MINATO-KU, TOKYO, JP;NISHIMOTO, YUKO, C/O SEMICONDUCTOR PROCESS, MINATO-KU, TOKYO, JP |
