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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH11220112(A)
申请公布日期
1999.08.10
申请号
JP19980019038
申请日期
1998.01.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
KAMIYA KOICHI
分类号
H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L27/115;H01L21/824
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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