发明名称 Manufacturing a display device using anodization
摘要 In an active matrix liquid crystal display device, gate lines in thin-film integrated circuits constituted of thin-film transistors are formed with aluminum. In forming the gate lines, before patterning a starting film of the gate lines, slits are formed in regions where hillock and whiskers, if they should occur, would cause crosstalk or short-circuiting, and portions of the gate lines within the slits are anodized. Wiring lines are formed by utilizing the regions where the slits were formed. As a result, there can be solved problems that undesired stress would otherwise occur during anodization and that currents large enough for anodization could not be supplied due to a complex wiring pattern. Gate lines in a pixel area are subjected to a separate anodization step.
申请公布号 US5936698(A) 申请公布日期 1999.08.10
申请号 US19960631844 申请日期 1996.04.12
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 KOYAMA, JUN
分类号 G02F1/1343;G02F1/136;G02F1/1362;G02F1/1368;H01L29/786;(IPC1-7):G02F1/13;G02F1/134 主分类号 G02F1/1343
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