发明名称 SOLID-STATE DEVICE MANUFACTURING APPARATUS
摘要 PROBLEM TO BE SOLVED: To enable quick recovery of an error, by easily identifying the cause of the error. SOLUTION: Unit controllers 31(1), 31(2),..., when performing automatic operation control, have functions of sending message indicating their control results to a CTC 33. An input/output part 32, when manually operated, has a function of sending a message indicating the manually operated result to the CTC 33. On the received messages, the CTC 33 has a function of creating data indicating an operation or processing and sending the data to the input/output part 32. The input/output part 32 has a function of creating a file indicating a history of execution of the operation or processing and displaying the image of the history file.
申请公布号 JPH11214276(A) 申请公布日期 1999.08.06
申请号 JP19980008813 申请日期 1998.01.20
申请人 KOKUSAI ELECTRIC CO LTD 发明人 TAKADA MASATOSHI;YAMAOKA AKINOBU;TAKADERA HIROYUKI
分类号 G06F11/34;B65G61/00;G05B19/418;G06Q50/00;G06Q50/04;H01L21/02 主分类号 G06F11/34
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