Direct drive with 4 axes of motion operating on hybrid stepper motor principle

摘要

The direct drive has at least one combination of an x, y and z direct drive. A planar moving part (1) with a length to width ratio of about 2:1 is mounted on an x-y planar stator. The x direct drive(s) for longitudinal motions is/are mounted in the center of the planar moving part. The y direct drives, whose total core plate area corresp. approximately to that of the x dive, are mounted in both outer regions of the moving part. At least one active unit (2) of a linear z drive is rigidly connected to the moving part and works perpendicularly to x and y. The corresp. passive unit (3) of the z drive protrudes laterally beyond the edge of the planar moving part.