Plasma-assisted particle surface modification especially for sputter coating, activation and etching of catalyst particles

摘要

Plasma-assisted surface modification of particles is carried out by particle passage through a hollow cathode plasma source for coating deposition or radical production on the particle surfaces. Plasma-assisted surface modification of particles is carried out by passing the particles through one or more parallel through-openings in a hollow cathode material of a plasma source while maintaining a plasma at 0.01 mbar to atmospheric pressure to effect deposition of a desired coating material or radical production on the particle surfaces. An Independent claim is also included for a hollow cathode plasma source comprising the cathode material described above, the through-openings having a cylindrical cross-section of 0.1-20 mm diameter.