| 摘要 |
PROBLEM TO BE SOLVED: To provide a microinjecting device improved in performance and life, a heating device of a microinjecting device, and its manufacture. SOLUTION: A microinjecting deviceμid 1 has a heating device 300 below a membrane 6 and a jetting device 200 above the membrane. The heating device is constituted of a substrate 1, a protecting film 2, a heating layer 20, a contact layer 30, an electrode layer 3 and a heating chamber barrier layer 5. The contact layer 30 reinforces a joint force of the heating layer and electrode layer, and therefore no gap is brought about between the heating layer and electrode layer.
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