发明名称 GRINDING/CLEANING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a grinding/cleaning method capable of performing good cleaning and/or grinding for an object having a complex structure or a fine shape. SOLUTION: A grinding/cleaning method comprises the steps of bringing an object 1 into contact with a mixture 5 between fine grains 3 and liquid 4, applying vibration to the mixture 5 to cause a liquefaction phenomenon, and eliminating a stain 2 on the surface of the object 1 in contact with the fine grains by the brushing motion of the fine grains in the mixture 5. Also, for example, for elimination of unevenness on the surface of the object, i.e., smoothing, unevenness 12 formed on the surface of the object 11 for one reason or another is ground and eliminated by a number of fine grains 13 making brushing motion by a liquefaction phenomenon, and the surface is made completely smooth. The liquefaction phenomenon of the fine grains 13 occurs because of vibration or the like applied to the mixture 5 between the fine grains 13 and the liquid 14.
申请公布号 JPH11207609(A) 申请公布日期 1999.08.03
申请号 JP19980030591 申请日期 1998.01.27
申请人 KAKEN:KK 发明人 ARAI OSAMU;SHIOMI YUKARI;TADENUMA KATSUYOSHI;KAMOSHITA AKIRA
分类号 B24B37/00;H01L21/304 主分类号 B24B37/00
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