发明名称 Method for surface treatment of a cadmium zinc telluride crystal
摘要 A method for treatment of the surface of a CdZnTe (CZT) crystal that reduces surface roughness (increases surface planarity) and provides an oxide coating to reduce surface leakage currents and thereby, improve resolution. A two step process is disclosed, etching the surface of a CZT crystal with a solution of lactic acid and bromine in ethylene glycol, following the conventional bromine/methanol etch treatment, and after attachment of electrical contacts, oxidizing the CZT crystal surface.
申请公布号 US5933706(A) 申请公布日期 1999.08.03
申请号 US19970864133 申请日期 1997.05.28
申请人 JAMES, RALPH;BURGER, ARNOLD;CHEN, KUO-TONG;CHANG, HENRY 发明人 JAMES, RALPH;BURGER, ARNOLD;CHEN, KUO-TONG;CHANG, HENRY
分类号 H01L21/465;(IPC1-7):H01L21/00 主分类号 H01L21/465
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