发明名称 |
Method for surface treatment of a cadmium zinc telluride crystal |
摘要 |
A method for treatment of the surface of a CdZnTe (CZT) crystal that reduces surface roughness (increases surface planarity) and provides an oxide coating to reduce surface leakage currents and thereby, improve resolution. A two step process is disclosed, etching the surface of a CZT crystal with a solution of lactic acid and bromine in ethylene glycol, following the conventional bromine/methanol etch treatment, and after attachment of electrical contacts, oxidizing the CZT crystal surface.
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申请公布号 |
US5933706(A) |
申请公布日期 |
1999.08.03 |
申请号 |
US19970864133 |
申请日期 |
1997.05.28 |
申请人 |
JAMES, RALPH;BURGER, ARNOLD;CHEN, KUO-TONG;CHANG, HENRY |
发明人 |
JAMES, RALPH;BURGER, ARNOLD;CHEN, KUO-TONG;CHANG, HENRY |
分类号 |
H01L21/465;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/465 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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