Cathodic arc vapor deposition apparatus

摘要

An apparatus for applying material by cathodic arc deposition to a substrate is provided which includes a vessel, means for maintaining a vacuum in the vessel, a cathode, a contactor, means for selectively sustaining an arc of electrical energy between the cathode and an anode, and an actuator. The cathode and contactor are positioned inside the vessel, and the contactor is electrically connected to the means for selectively sustaining an arc of electrical energy. The actuator selectively actuates the contactor into electrical contact with the cathode, and thereby electrically connects the cathode to the means for sustaining an arc of electrical energy.