发明名称 MBE deposition method employing effusion cell having a unibody crucible
摘要 A unibody, monolithic, one-piece negative draft crucible for a MBE effusion cell. The crucible maximizes capacity, uniformity and long term flux stability, and minimizes oval defects, depletion effects, and short term shutter-related flux transients. The invention also provides a method and mandrel apparatus for making a unibody containment structure, such as a crucible formed of PBN, having a negative draft, via chemical vapor deposition.
申请公布号 US5932294(A) 申请公布日期 1999.08.03
申请号 US19970816166 申请日期 1997.03.12
申请人 CHORUS CORPORATION 发明人 COLOMBO, PAUL E.;DONADIO, ROBERT F.
分类号 C30B23/08;C04B35/583;C23C14/24;C23C16/01;C23C16/34;C30B23/06;F27B14/10;F27D1/16;H01L21/203;(IPC1-7):H05H1/24;F27B14/02 主分类号 C30B23/08
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