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发明名称
TEMPERATURE SENSOR OUTPUT VOLTAGE GAIN CONTROL CIRCUIT OF FLAT FILM PROCESS APPARATUS
摘要
申请公布号
KR200153145(Y1)
申请公布日期
1999.08.02
申请号
KR19960003193U
申请日期
1996.02.27
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
HONG, UN-PUO;LEE, CHANG-HEE
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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