发明名称 DEVICE AND METHOD FOR TREATING SUBSTRATES
摘要 A device and a method for treating substrates in a receptacle containing a treatment fluid, comprising a lowering and lifting device for said substrates. The introduction and extraction times for the substrates are optimised by modifying the lifting speed of the lowering and lifting device according to the dimensions of the substrates or by modifying the lifting height of the lowering and lifting device according to the dimensions of said substrates.
申请公布号 WO9938198(A1) 申请公布日期 1999.07.29
申请号 WO1998EP08469 申请日期 1998.12.28
申请人 STEAG MICROTECH GMBH;STORZ, MICHAEL;REBSTOCK, LUTZ;FINGERHOLZ, AURELIA 发明人 STORZ, MICHAEL;REBSTOCK, LUTZ;FINGERHOLZ, AURELIA
分类号 H01L21/677;B05D1/18;H01L21/00;H01L21/304;H01L21/306 主分类号 H01L21/677
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