| 摘要 |
<p>A method and an apparatus for an optical inspection of an object (12), having upper (12A) and lower (12B) faces, so as to detect defects existing on the object. First and second beams (118A, 130A) of an incident radiation are produced and directed onto the object. A light component (140) of the first incident beam, which is reflected from one face of the object, and a light component (142) of the second incident beam, which is transmitted through the upper and lower faces of the object, are simultaneously sensed. First and second images, formed, respectively by reflected and transmitted light components are acquired and analyzed so as to provide data indicative of the defects.</p> |
