发明名称 Ion collector assembly
摘要 <p>An ion collector includes a Faraday collector having a conductive surface disposed substantially parallel to and spaced from the axis of an entering particle beam containing charged and uncharged particles. A grounded plate disposed in the path of the particle beam allows incoming uncharged particles to impinge thereupon. Preferably, the application of a suitable potential to the conductive plate manipulates incoming charged ions to impinge upon either the electron multiplier or the Faraday collector. The ion collector can further include an electron multiplier used in conjunction with the Faraday collector to allow separate modes of operation. Application of a suitable first potential to the electron multiplier can cause charged particles to be deflected directly to the Faraday collector in one mode, and application of a second potential can cause deflection of charged particles to the electron multiplier, with the effects of the uncharged particles on the output of the detector being minimized. &lt;IMAGE&gt;</p>
申请公布号 EP0932184(A1) 申请公布日期 1999.07.28
申请号 EP19990101152 申请日期 1999.01.21
申请人 LEYBOLD INFICON, INC. 发明人 PARFITT, WILLIAM E.;KARANDY, TIMOTHY L.;FREES, LOUS C.;ELLEFSON, ROBERT
分类号 H01J49/02;(IPC1-7):H01J49/02 主分类号 H01J49/02
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