发明名称 High voltage feed through
摘要 A high voltage feed through supplies power to a device through a passage in a wall of a vacuum chamber. The feed through includes a ceramic body comprising a first brazing surface, a second brazing surface, and a central passage for a conductor, a power source connector brazed to the first brazing surface, and a mounting flange brazed to the second brazing surface, wherein the first and second brazing surfaces are positioned to reduce tensile forces on brazed connections. The brazing surfaces are preferably coplanar to reduce the tensile forces, or angled to place residual compressive forces on the brazed connections. The tensile forces on co-planar surfaces are further reduced by brazing ceramic rings to the power source connector and the mounting flange opposite brazed connections to the ceramic body of the feed through.
申请公布号 US5929373(A) 申请公布日期 1999.07.27
申请号 US19970880229 申请日期 1997.06.23
申请人 APPLIED MATERIALS, INC. 发明人 SCHIAVO, TONY;BRODINE, JEFF;MAROHL, DAN
分类号 H01B17/30;H01J37/32;(IPC1-7):H05K5/06 主分类号 H01B17/30
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