首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
INDUCTION COUPLING TYPE PROCESS PLASMA APPARATUS
摘要
申请公布号
JPH11200057(A)
申请公布日期
1999.07.27
申请号
JP19980009396
申请日期
1998.01.21
申请人
MITSUBISHI HEAVY IND LTD
发明人
UEDA NORIAKI
分类号
H05H1/46;C23C14/54;C23C16/50;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):C23C16/50;H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
您可能感兴趣的专利
Aqueous catalyst sulfiding process
Use of pnp inhibitors such as forodesine in combination with alkylating agents for treating hematologic cancers
Scalable primate pluripotent stem cell aggregate suspension culture and differentiation thereof
REACTION PRODUCTS OF GUANIDINE COMPOUNDS OR SALTS THEREOF, POLYEPOXIDES AND POLYHALOGENS
CLEANING SOLUTION AND METHOD FOR MANUFACTURING DISPLAY DEVICE USING THE SAME
A CHARGING MEMBER
HEARING AID HAVING THE RECEIVER
GROUNDING MODULE MADE BY COMBINATION OF GRAPHITE, PERLITE AND VERMICULITE
APPARATUS AND METHOD FOR DRIVING PIEZOELECTRIC ACTUATOR, AND PIEZO PIEZOELECTRIC ACTUATOR DRIVING SYSTEM USING THE SAME
HIGH ENERGY ION IMPLANTING DEVICE, BEAM CURRENT REGULATING DEVICE, AND BEAM CURRENT REGULATING METHOD
ICE BIN AND ICE TRANSFERRING METHOD USING THE SAME
APPARATUS FOR GENERATING OBSTACLE MAP USING ULTRASONIC SENSORS AND METHOD THEREOF
DESALINATOR WITH REMOVAL WATER STORAGE
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THEREOF
STRANDED WIRE TYPE AC CABLE
PHARMACEUTICAL COMBINATION COMPRISING SUSTAINED-RELEASE TYPE METFORMIN AND IMMEDIATE-RELEASE TYPE HMG-COA REDUCTASE INHIBITOR
ULTRASOUND APPARATUS AND OPERATING METHOD FOR THE SAME
LIGHT SPARK EMITTING DEVICE WITH DIRECTIONAL RADIATION PATTERN
ACCELERATOR
MICROCRACKS DIAGNOSTIC APPARATUS AND METHOD
