| 摘要 |
An apparatus for manufacturing a chamber, the chamber including first and second glass substrates and an enclosure arranged between the substrates or an enclosure and at least one spacer arranged between the substrates. The apparatus includes a pair of heating plates, having heaters therein, for holding the glass substrates, a temperature controller for controlling the temperature of the heaters, a position alignment device for moving at least one of the pair of heating plates in X-, Y-, and theta -directions, a first driving device for driving the position alignment device, a second driving device for moving at least one of the pair of heating plates in a Z-direction, an image monitoring device for monitoring the positions of the first and second substrates, and a control device for supplying a command to one of the first and second driving devices on the basis of information supplied from the image monitoring device
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