发明名称 CLEAN ROOM BUILDING AND EXECUTING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To enable a short term of works by making the first layer as an air chamber, the second layer as a lean room, the third layer as an utility space and the fourth layer as a main equipment space, respectively, and constituting the boundary of the third layer and the fourth layer so as to partition air. SOLUTION: In an upper layer area of a clean room 2, an air chamber 1 for blowing out circulating air downward from a system ceiling surface 8 is provided. In a lower layer area of the clean room 2, utility space 3 which flows air flow from a system floor surface 5 and is sued also as a circulating air chamber is provided. In a lower layer area of utility space 3, main equipment space 4 of a main duct and a main piping is provided. The boundary of utility space 3 and main equipment space 4 is constituted so as to partition air. As a result of this constitution of the clean room building into at least a four-layer structure, a floor construction, a ceiling construction, a roof construction and an equipment construction which are necessary for each layer can be performed by performing upper and lower congestion. Therefore, a short term of works can be attained by a simultaneous execution.
申请公布号 JPH11200651(A) 申请公布日期 1999.07.27
申请号 JP19980008387 申请日期 1998.01.20
申请人 TAKENAKA KOMUTEN CO LTD 发明人 KAKIZAKI JIRO;SOEDA FUMIO;KUROSU MASAAKI
分类号 E04B9/00;E04H5/02;F24F7/06;H01L21/02 主分类号 E04B9/00
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