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发明名称
DEPOSITION METHOD
摘要
申请公布号
JPH11200068(A)
申请公布日期
1999.07.27
申请号
JP19980001708
申请日期
1998.01.07
申请人
KOBE STEEL LTD
发明人
FUJIKAWA TAKAO;NARUKAWA YUTAKA;KADOGUCHI MAKOTO
分类号
C23C14/58;C23C26/00;(IPC1-7):C23C26/00
主分类号
C23C14/58
代理机构
代理人
主权项
地址
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